In semiconductor manufacturing, equipment must meet strict purity and stability standards. Our coating and lining services are developed to protect processing equipment from chemical corrosion, surface wear, and unwanted adhesion, ensuring reliable performance in demanding environments. Backed by over two decades of experience, our team works within Class 1,000 and Class 10,000 cleanrooms designed for the treatment of components used in electronic chemical and polymer production. Strict environmental controls help minimize contamination and ensure that coated surfaces meet the purity requirements for chemical storage and reaction stability. The result: reduced metal ion release, improved consistency, and longer conductor manufacturing equipment service life.

• Corrosion resistance
• High purity
• Non-stick surface
• Static control
• Low friction

• Mixing
• Filtration
• Drying
• Mobile tankers
• Storage tanks
• Semiconductor transport and cleaning parts
• Packed towers
• Adsorption resin columns

Equipment used in semiconductor manufacturing, such as reactors, preparation tanks, filters, and quartz lift ing manipulator, requires surface protection that meets strict purity and chemical resistance standards. We offer coating and lining services using PFA, ECTFE (F30, Halar), and PVDF, with achievable purity grades ranging from G2 to G5. All coatings are processed in our dedicated Class 1,000 cleanroom, designed for semiconductor applications. This controlled environment helps minimize contamination and ensures stable, high-quality finishes across a variety of equipment types.

Examples of Fluoropolymer Coating Applications

Photoresist preparation vessel
Coated with high-purity PFA to ensure total metal ion content below 1 ppb, with gold ion levels under 0.2 ppb. Conductive PFA is also available, with resistivity ranging from 10⁻⁵ to 10⁻⁹ Ω•cm and purity from 10 ppb to 1 ppb.

PI (Polyimide) reaction vessel
Used in the production of polyimide materials for semiconductor applications. These vessels are coated with high-purity PFA to minimize metal ion contamination, meeting strict purity requirements: total metals below 1 ppb and gold ions below 0.2 ppb.

Wafer transfer robot
Coated with high-cleanliness fluoropolymer to prevent metal ion contamination during wafer transfer. Coating can also be applied on ceramic substrates. Anti-static options are available to meet specific ESD protection needs.

Double-sided precision polishing machine
Used in applications like semiconductor substrates, transistors, and precision optics. High-purity PFA coating is applied to key components to provide corrosion resistance and reduce metal contamination. Excellent durability against strong acids, alkalis, and organic solvents.

Quartz lifting manipulator
Protects quartz and similar substrates from chemical exposure, including hydrofluoric acid. The coating offers excellent hydrophobic and oleophobic properties, minimizing contamination from cleaning fluids. Suitable for temperatures from -180 °C to 260 °C.

Wafer polishing equipment

Electronic-grade reactor (high-purity PFA coating)

Photoresist reactor (high-purity PFA coating)

PFA coating for PI polymerization equipment

Agitated vessel (high-purity PFA coating)

Coating in ISO class 5 cleanroom

We provide fluoropolymer lining services for various semiconductor manufacturing equipment, including portable containers, vertical and horizontal tanks, and filtration units. Materials such as PFA, ECTFE, and PVDF are used depending on process needs, with purity levels from G3 to G5. Production takes place in our dedicated cleanroom facility, ensuring consistent quality and a high level of cleanliness throughout the lining process.

Examples of Fluoropolymer Lining Applications

New-PTFE lining for ultra-clean hydrofluoric acid storage tanks

Lined PTFE tanks for storing electronic-grade chemical products

Nitrogen trichloride reaction tank lined with PFA

High-purity N-PTFE lining for portable tanks

N-PTFE GBK lining for electronic-grade sulfuric acid containers

Cartridge filter housings lined with electronic-grade PFA

PFA-lined high-temperature plating tank